Master of Science in Micro- and Nanotechnologies

Technische Universität Ilmenau · Ilmenau, Germany

Level
Master's
Award
Master of Science
Language
English
Duration
4 semesters
Campus
Ilmenau
Apply by
<p>Please visit:&nbsp;<a href="https://campus.tu-ilmenau.de/apply">https://campus.tu-ilmenau.de/apply</a></p>
Starts
Winter semester

Technische Universität Ilmenau does not publish a fee for this programme on its own. Its published rate for master's programmes is €0 a year for international students.

Entry requirements and how to apply

Entry requirements
For admission to the Master of Science in Micro- and Nanotechnologies (MSc MNT), the successful completion of a Bachelor's or comparable course of at least six semesters or 180 credit points is required. The MSc MNT builds upon Bachelor's degrees in the following fields: electrical, electronics and communications engineering mechatronics technical physics material science mechanical engineering All of the above Bachelor's degree programmes must include an in-depth component in the following areas: fundamentals of electrical engineering electronics/microelectronics analogue and digital electronics semiconductor physics/technology material science physics, chemistry, and higher mathematics
English language requirement
C1 required, please provide an official language certificate, e.g.: TOEFL iBT Home Edition (before 2026): 95 Reading: 24 Listening: 22 Speaking: 25 Writing: 24 TOEFL iBT (since 2026): 5 Reading: 5 Listening: 5 Speaking: 5 Writing: 5 TOEIC: 945 Reading: 455 Listening: 490 Speaking: 180 Writing: 180 PTE Academic: 76 IELTS Academic: 7 Cambridge English Qualifications: C1 Advanced
German language requirement
No minimum language level required
Application period
Please visit: https://campus.tu-ilmenau.de/apply
Apply through
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About this programme

Studying microtechnologies and nanotechnologies at the TU Ilmenau offers a combination of classical microtechnologies and modern nanotechnologies. It covers methods, tools, and theoretical considerations for research and development in the world of microscale and nanoscale structures. The aim of this engineering science-oriented interdisciplinary Master's programme is to teach the scientific fundamentals and basic technical knowledge about microstructure and nanostructure generation as well as their systemic integration in systems. Students acquire skills to contribute and drive future developments in microtechnologies and nanotechnologies as well as nanotechnical applications. Particular attention is devoted to teaching the relevant methodological variety of lithographic nanostructuring techniques (top-down strategy), the molecular structuring through self-assembly (bottom-up approach), the opportunity of combining both concepts, and the required characterisation techniques. The programme comprises the following foci: Nanotechnology, nanoelectronics, and nanosensors Materials for microtechnologies and nanotechnologies Technologies of microstructuring and nanostructuring Structure and material characterisation Semiconductors Microsystems technology / system integration Microelectronic packaging and assembly Under the principle of unity of research and teaching, this interdisciplinary programme is supported by the Institute of Micro- and Nanotechnologies MacroNano® and its Cen

Related pages

Other degree programmes at Technische Universität Ilmenau